To weld in the micro range an exact positioning of the beam is required. With the FOCUS MEBW-60 the work piece can be observed in its totality and in the microscopic range up to a resolution of about 25µm by means of a scanning electron beam (SEM-mode). To generate the picture two alternative detectors can be selected. During the welding of dissimilar metals an enhanced material contrast is needed (0° detector) and to enhance the topographic contrast the 45° detector can be used.

The included software package allows to program complex welding tasks with a CNC control unit, or for delicate parts like shown in the picture, with a “teach-in-programming” which allows the drawing of the designated welding trace into the SEM-Picture. To simplify the programming of the common weld tasks like circular welds we provide a very user friendly programming software, including spot welding to avoid distortion through the welding.

For high-precision processing an exact workpiece manipulation is necessary. In order to achieve this, we have developed a CNC system with position accuracy less than 30 µm and a movement speed of up to 100 mm/s. For reduced maintenance, the stepper motors are located outside the chamber.

Whenever the workpiece requires axial or radial welding we offer different rotary manipulators which are fully integrated into the CNC control unit.

The most recent version of the MEBW-60 family, the L135, is a unique tool combining precise electron beam power control down to the µm-range with high productivity and ultimate flexibility.

The MEBW-60 L135 is equipped with either a CNC driven bottom mounted x/y table or with a side mounted rotary manipulator. Conversion from a large single-drum into a six-drum rotary manipulator for high throughput and batch processing is very convenient. The optional egun-shift solution allows for maximum positioning flexibility.

Workpiece observation is realized with the unique FOCUS SEM Mode “Scan & View” or by traditional optical means using a camera/lens system combination. A low maintenance pumping system with high pumping speed allows for very fast turnaround cycles.

Generator Slide:
The new generator slide allows for individual lateral positioning of the power beam in the vacuum chamber. In combination with the fixed mounted rotary motion manipulators, the generator slide allows for flexible beam positioning for radial or axial welds. Multiple radial or axial welds within one vacuum cycle is possible.